Micro Machining

Some basic aspects involved in laser micro machining of ceramics like material removal , surface integrity and dimensional precision are discussed .

本文讨论了用激光对陶瓷零件表面作微细加工的一些基本问题：余量去除、已加工表面完整性和尺寸精度等。

Because of the characteristic of USM ( Ultrasonic Machining ), it is fitter for processing these materials in micro machining field .

超声加工工艺在加工硬脆材料方面的独特优势，使其在微细加工领域占有一席之地。

Research on Auto Focus System Suitable for Laser Micro Machining

适用于激光微加工的自动对焦系统的研究

Design of Precision Positioning Servo System for a Micro Machining Tool

微小切削设备的精密进给单元伺服控制设计

Wire electrochemical micro machining by using in situ fabricating wire electrode

基于线电极原位制作的微细电解线切割加工

Conventional Machining Methods Adapted to Micro machining

适用于微机械制造的常规加工方法

Micro Machining Process Experimental research of micromachining silicon by excimer laser ablation in air and under water

水辅助准分子激光微加工硅的实验研究

The non silicon micro machining process and some devices such as different kinds of micro hinges are reported .

本文讨论了非硅微机械工艺和微绞链的研制工艺。

With the development of pulse laser micro machining technology and increasingly higher requirement for machining accuracy , the laser processing system needs an improvement .

随着脉冲激光微加工技术的日益进步，以及对加工精度的要求越来越高，对激光加工系统提出了更高的要求。

Micro Machining and MEMS

微细切削加工与微机械制造

Based on some related micro machining processes , a process flow is planed to fabricate make the piezoresistive sensor chip successfully .

基于一些相关的微加工工艺制定了制作这种微传感器的工艺流程并且制作成功了传感芯片。

The developments of MEMS , Micro Machining technology make it possible to fabricate Micro Turbine Engine ( MTE ) .

MEMS技术、微加工技术的发展，使得微型涡轮喷气发动机（MicroTurbineEngine，MTE）的制造成为可能。

The paper uses improved micro machining high-precision capacitance type three axis acceleration sensor to reduce sensor damping factor and improve the resolution of the sensor .

利用改良的微加工高精度电容式三轴加速度传感器，减小传感器的阻尼因子，提高了传感器的分辨率。

The measuring results of the above sensors indicate that the micromachining is very important to improve their performances . Three Dimensional Laser Micro Machining of Ceramics

传感器性能的测试结果表明了微机械加工对提高传感器性能的重要性。激光微细加工三维陶瓷表面

With the wide applications of laser lithography in laser micro machining fields , measuring and evaluating optical system of laser lithography obtains intensive attentions .

随着光刻技术在微加工领域的广泛应用，如何有效地测试和评价准分子激光光学系统已经成为光刻技术研究中的关键问题。

We developed a non silicon surface micro machining process with two or three mask electroplating layers and using polyimide or photoresist as sacrificial layers .

我们研制的非硅表面微机械工艺采用两次或三次掩模电镀层，聚酰亚胺和光刻胶分别作为底层和第二、第三层的牺牲层。

This paper deals with the process of microtechnology / nanotechnology , micro machining , the concept and main topic of MEMS and other fields .

本文论述微米纳米制造技术的发展过程，微细加工的进展，微型机电系统的概念、主要研究课题，以及它的应用领域。

With the rapid development of MEMS ( Micro-Electro-Mechanical Systems ) and microfluidic chip technologies , photosensitive glass has been widely used in micro machining field for its own advantages .

随着MEMS和微流控芯片技术的快速发展，光敏玻璃凭借其特有的优点，在微器件领域开始得到广泛应用。

Since the emergence of UV laser which has shown the advantages of photochemical effects in aspect of material processing , it has become a highlight in the field of micro machining .

紫外激光自出现以来，以其在材料加工中表现出来的热效应少等优点，成为微细加工方面的一个研究热点。

The key to produce minimized products is micro machining technique , such as micro electrical discharge machining ( EDM ), laser machining and micro ultrasonic machining ( USM ) .

支撑机械微型化的关键就是先进的微细特种加工技术，如微细电火花加工、激光加工和微细超声波加工等。

The results show that YAG laser micro machining of Al 2O 3 plates used for the manufacture of the gas sensor arrays is easily controllable , flexible , convenient and cheap .

研究表明激光微加工方法制作纳米气敏传感器阵列是一种可控性好、灵活、方便、廉价的制作方法。

Thirdly , the design flow based the mask layout and the 3D solid model were respectively validated on the basis of the design of typical MEMS device & Z axis micro machining gyroscope .

再次，结合典型MEMS器件&Z轴微机械陀螺的设计，分别验证了基于版图和基于三维实体的MEMS工艺集成化设计流程。

As a new technology , micro machining technology can be used in a variety of materials machining and obtain ultra-high precision parts , so it attracts more and more international attention in academia and industry .

微细切削技术作为一项新的工艺技术，其可加工材料的多样性以及可获得的超高零件精度，使国内外学术界和工业界对微细切削技术的研究越来越重视。

According to the sizes and accuracy of the laser machining workpieces , laser materials processing is classified into three kinds : laser machining of big size pieces , precision laser machining and laser micro machining .

根据加工对象尺寸与加工精度的不同，将激光加工分为大型件激光加工、精密激光加工与激光微细加工技术三大类。

In order to solve the problems including the limitation of the micro machining using AFM only and the influence of various factors on the results , a method of non silicon microstructure based on AFM is presented .

为了解决AFM单独用于机械刻蚀加工存在的局限性以及加工过程中各种因素对加工结果的影响等问题，提出一种基于AFM的非硅工艺微结构的加工方法。

Gaining the 3-D shape information or space position of MEMS components is very important in many applications , such as visual detection and control in micro machining , visual servo controlling in micro manipulation system et al .

在许多应用中（如微制造中的视觉监控和实时测量，微操作系统中的视觉伺服等），获取微对象相关的几何信息（三维尺寸和空间位置等）十分重要。

The technical characteristics and application between common micro machining and micro-EDM are compared and analysed . And then the principle and its application of wire electrode discharge grinding ( WEDG ) in micro machining are discussed .

比较分析了常用微细加工与微细电火花加工方法的特点及应用，论述了线电极电火花磨削技术的原理及在微细加工中的作用。

The general situation and characteristics of non traditional machining technology are introduced , and the common non traditional machining methods used in precision machining and micro machining , including their technological features , application fields and machining accuracy , are also commented .

介绍了特种加工技术的概况及特点，并对精密微细加工中常用的特种加工方法的技术特点、应用领域及加工精度进行了评述。

Micro machining technology is different from etching technology , thin-film technology and LIGA technology , and it can create a complicated three-dimensional small part of different materials quickly with higher precision at lower cost , then micro cutting has a promising application prospect .

不同于刻蚀技术、薄膜技术和LIGA技术，微切削加工技术可以快速高精度低成本地制造复杂三维微小零件，有着广阔的应用前景。

In this paper , via exemplifications the authors summed the achievements in micro machining by using non traditional machining methods which include electrical discharge machining , electrochemical machining , ultrasonic machining , laser machining , precision electroforming and the like .

通过例证概括介绍了特种加工方法在微细加工方面所取得的成就，这些加工技术包括：电火花加工、电化学加工、超声加工、激光加工、精密电铸等。